AIX G5+ C Planetary Reactor® for GaN on 150/200 mm Si
Deposition system for compound semiconductors
  • Chosen by the best in the industry
  • Highest throughput
  • Lowest Cost of Ownership
  • Highest yield performance
  • 1st fully automated MOCVD platform with Cl2 in-situ cleaning and cassette-to-cassette wafer handler

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