BM 300T
Deposition system for carbon nanomaterials
  • Uniform deposition of graphene and carbon nanotubes at 300 mm wafer scale
  • Thermal and Plasma Enhanced CVD for process flexibility
  • 3-zone substrate heating, max. temperature 1050 °C
  • Independent top heater with 3 zones
  • Compatible with multi or single wafer transfer module

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