XEI Scientific, Inc. is the recognized leader in downstream plasma cleaning. The Evactron® Plasma De-Contaminator™ is an RF plasma cleaner that reduces hydrocarbon contamination in vacuum chambers improving electron microscope imaging and analytical performance.
Evactron plasma cleaners can also be used as an in-situ solution for cleaning EUV and X-ray optics as well as SEM and TEM samples. The Evactron De-Contaminator plasma source can be rack mounted or installed on most vacuum chambers and electron microscopes.
